产品目录
Name Formula Description Application SDS
三甲基镓/TMGa (CH3)3Ga Trimethylgallium,CAS No:1445-79-0,Relative density:1.15 MOCVD
三甲基铟/TMIn (CH3)3In Trimethylindium,CAS No:3385-78-2,Relative density:1.568 MOCVD
三乙基镓/TEGa (C2H5)3Ga Triethylgallium,CAS No:1115-99-7,Relative density:1.058 MOCVD
三甲基铝/TMAl (CH3)3Al Trimethylaluminum,CAS No:75-24-1,Relative density:0.752 MOCVD, ALD
二乙基锌/DEZn (C2H5)2Zn Diethylzinc,CAS No:557-20-0,Relative density:1.205 PECVD, ALD
二乙基碲/DETe (C2H5)2Te Diethyltellurium,CAS No:627-54-3,Relative density:1.599 MOCVD
四(二甲氨基)钛/TDMAT (N(CH3)2)4Ti Tetrakis(dimethylamino) titanium,CAS No:3275-24-9,Relative density:0.947 PECVD
四双(乙基甲基氨)铪(IV)/TEMAH (N(C2H5)(CH3)) Tetrakis(ethylmethylamino) hafnium,CAS No:352535-01-4,Relative density:1.324 PECVD, ALD
三氧化二锑/Sb2O3 Sb2O3 Antimony trioxide,CAS No:1309-64-4,Relative density:5.2 Ion Imp1ant
五(二甲氨基)钽(V)/PDMAT (N(CH3)2)5Ta Pentakis(dimethylamino) tantalum,CAS No:19824-59-0 ALD
二茂铁/Cp2Fe Fe(C5H5)2 Bis(cyclopentadienyl)Iron,CAS No:102-54-5,Relative density:1.49 MOCVD
二茂镁/Cp2Mg Mg(C5H5)2 Bis(cyclopentadienyl) magnesium,CAS No:1284-72-6 MOCVD
三氯溴甲烷/CBrCl3 CBrCl3 Bromotrichloromethane,CAS No:75-62-7,Relative density:2.012 MOCVD
环己烷/Cyclohexane C6H12 Cyclohexane,CAS No:110-82-7,Relative density:0.779 MOCVD
四溴化碳/CBr4 CBr4 Carbon tetrabromide,CAS No:558-13-4,Relative density:3.42 MOCVD
三乙基锑/TESb C6H15Sb Antimony triethyl,CAS No:617-85-6,Relative density:1.32 MOCVD
正己烷/n-Hexane C6H14 n-Hexane,CAS No:110-54-3,Relative density:0.6548 MOCVD
四(乙基甲基氨基)锆(IV)/TEMAZ C12H32N4Zr Tetrakis(ethylmethylamino)zirconium(IV),CAS No:175923-04-3,Relative density:1.049 ALD