TSA
Property information
| CAS No | 13862-16-3 |
| Formula | (SiH3)3N |
| Name | Trisilylamine |
| Chemical Formula | 107.33 |
| Appearance | Liquid |
| Stability | Highly flammable liquid and vapor. In contact with water releases flammable gases which may ignite spontaneously. |
| Relative density | 0.895(water =1) |
| Melting Point | -106 ˚C |
| Boiling Point | 52 ˚C |
| Flash point | -48 ˚C |
| decomposition point | 358°C |
| vapor pressure | 315 mmHg @20˚C |
| Note | Trisilylamine (SiH3)3N (TSA) is a highly volatile (315 torr @ 25°C) C-free and Cl-free precursor for Si3N4 and oxynitride with low T capabilities (575-700°C). It provides extremely clean process (no NH4Cl) with high step coverage capabilities and tunable Si/N ratio. Silicon nitride films exhibit very low H content. If you need this product, SDS or products manual, please phone sales department +886-3-6576140, Email: sales@ppmiglobal.com |
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